The photonics market, primarily based on compound semiconductor materials, includes devices which typically emit, reflect, transmit or absorb photons. The principle devices in this market include:

Arrayed Waveguides (AWG)
IR detectors
Optical Switches

Plasma-Therm’s extensive experience with compound semiconductors has made it a leading supplier for the photonics market. Both R&D and production needs are supported. With an installed base of over 1300 systems, Plasma-Therm has developed a library of process information.

Typical Applications

  • Etch
    • InSb
    • HgCdTe
    • InP
    • GaAs/AlGaAs/InGaAs
    • SiO2
    • Si3N4




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